The Computer History Museum's Silicon Engine essay on Jean Hoerni's 1959 invention of the planar manufacturing process, in which a wafer's own oxide layer is patterned and used as a mask.
Facts
PublisherComputer History Museum
URLhttps://www.computerhistory.org/siliconengine/invention-of-the-planar-manufacturing-process/
Source Typecustodian topic essay
Reliability Tier1
The Computer History Museum's own Silicon Engine essay on the 1959 planar process, a named institutional account with editorial and archival oversight, the top tier alongside other institutional primary accounts. Sources
Claims Backed By This Source (5 claims)
This source backs 5 claims across the atlas. As facts: 4 well-attested. Plus 1 entities citing it as a general reference with no single fact or relationship attached.
Disposition By Topic
- Sources, 4 claims: 4 well-attested.
- Articles, 1 claims: 1 general references.
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